Title:
Semiconductor Science and Technology
Abbreviated Title:
Semicond. Sci. Technol.
Publisher:
IOP Publishing
ISSN
(Print):
0268-1242
ISSN
(Electronic):
1361-6641
Publication date Created:
April
01 2003
Publication date
(Print):
April
01 2003
Volume: 18
Issue: 4
Pages: R33-R51
Article
DOI: 10.1088/0268-1242/18/4/201
SO-VID: b604e37e-5d72-4f78-b229-2351ad2e0b8c
Copyright © ©
2003