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Silicon-Containing Polymers
Microlithographic Applications of Organosilicon Polymers
other
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Most cited references39
- Record: found
- Abstract: not found
- Article: not found
Oxygen plasma removal of thin polymer films
T. M. Wolf, G. Taylor (1980)
- Record: found
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- Article: not found
High resolution, steep profile resist patterns
J. M. Morán, D. Maydan (1979)
- Record: found
- Abstract: not found
- Article: not found
Approaches to the Design of Radiation-Sensitive Polymeric Imaging Systems with Improved Sensitivity and Resolution
C Willson (1986)