Title:
Journal of Microelectromechanical Systems
Abbreviated Title:
J. Microelectromech. Syst.
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
ISSN
(Print):
1057-7157
ISSN
(Electronic):
1941-0158
Publication date Created:
February
2009
Publication date
(Print):
February
2009
Volume: 18
Issue: 1
Pages: 174-185
Article
DOI: 10.1109/JMEMS.2008.2008624
SO-VID: b8c1d3d2-235d-41cd-a084-62c4e15b44fa
Copyright © ©
2009