Journal ID (publisher-id): JVTBD9
Title:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Abbreviated Title:
J. Vac. Sci. Technol. B
Publisher:
American Vacuum Society
ISSN
(Print):
0734211X
Publication date Created: 2001
Publication date
(Print):
2001
Volume: 19
Issue: 6
Page: 2874
Article
DOI: 10.1116/1.1421557
SO-VID: c79d59b1-e34d-4469-8e85-49460500f23c
Copyright © ©
2001