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      Thermal conductivity measurements of thin-film resist

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          Thermal conductivity of polymers

          C.L. Choy (1977)
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            Experimental investigation of thermal conduction normal to diamond‐silicon boundaries

            M Rösler, R. Zachai, O. Käding … (1995)
            Article 0 comments Cited 33 times – based on 0 reviews     Review now
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              A new method for measuring thermal conductivity of thin films

              S Govorkov, W. Ruderman, M. W. Horn … (1997)
              Article 0 comments Cited 10 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Journal ID (publisher-id): JVTBD9
                Title: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
                Abbreviated Title: J. Vac. Sci. Technol. B
                Publisher: American Vacuum Society
                ISSN (Print): 0734211X
                Publication date Created: 2001
                Publication date (Print): 2001
                Volume: 19
                Issue: 6
                Page: 2874
                Article
                DOI: 10.1116/1.1421557
                SO-VID: c79d59b1-e34d-4469-8e85-49460500f23c
                Copyright © © 2001
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