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      Optical nanolithography using a scanning near-field probe with an integrated light source

      Author(s): , , , ,
      Publication date Created:
      Publication date (Print):
      Journal: Applied Physics Letters
      Publisher: AIP Publishing

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          Scanning near-field optical microscopy with aperture probes: Fundamentals and applications

          Bert Hecht, Beate Sick, Urs Wild … (2000)
          Article 0 comments Cited 106 times – based on 0 reviews     Review now
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            Design, fabrication and testing of microlens arrays for sensors and microsystems

            H. Herzig, S Haselbeck, M. Eisner … (1997)
            Article 0 comments Cited 41 times – based on 0 reviews     Review now
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              Sub-diffraction-limited patterning using evanescent near-field optical lithography

              M. Alkaisi, D. R. S. Cumming, R Cheung … (1999)
              Article 0 comments Cited 34 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Title: Applied Physics Letters
                Abbreviated Title: Appl. Phys. Lett.
                Publisher: AIP Publishing
                ISSN (Print): 0003-6951
                ISSN (Electronic): 1077-3118
                Publication date Created: November 24 2008
                Publication date (Print): November 24 2008
                Volume: 93
                Issue: 21
                Page: 213103
                Article
                DOI: 10.1063/1.3032912
                SO-VID: d7f45399-1789-475d-8656-aca66bcc7a41
                Copyright © © 2008
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