Title:
Semiconductor Science and Technology
Abbreviated Title:
Semicond. Sci. Technol.
Publisher:
IOP Publishing
ISSN
(Print):
0268-1242
ISSN
(Electronic):
1361-6641
Publication date Created:
July
01 2013
Publication date
(Print):
July
01 2013
Publication date
(Electronic):
June
21 2013
Volume: 28
Issue: 7
Page: 074019
Article
DOI: 10.1088/0268-1242/28/7/074019
SO-VID: da10f979-188d-4df7-85eb-17fa8f47632d
Copyright © ©
2013