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      • Record: found
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      Finer features for functional microdevices.

      Author(s): 1 , , ,
      Publication date (Electronic):
      Journal: Nature
      Publisher: Springer Science and Business Media LLC

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          Journal
          Journal ID (iso-abbrev): Nature
          Title: Nature
          Publisher: Springer Science and Business Media LLC
          ISSN: 0028-0836
          ISSN (Print): 0028-0836
          Publication date (Electronic): Aug 16 2001
          Volume: 412
          Issue: 6848
          Affiliations
          [1 ] Department of Applied Physics, Osaka University, Suita, Osaka 565-0871, Japan. kawata@ap.eng.osaka-u.ac.jp
          Article
          Publisher Item ID: 35089130
          DOI: 10.1038/35089130
          PubMed ID: 11507627
          SO-VID: dee266f3-0b14-40fc-931b-7518f9a7eeba
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