Journal ID (publisher-id): JVTBD9
Title:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Abbreviated Title:
J. Vac. Sci. Technol. B
Publisher:
American Vacuum Society
ISSN
(Print):
0734211X
Publication date Created: 1984
Publication date
(Print):
1984
Volume: 2
Issue: 2
Page: 276
Article
DOI: 10.1116/1.582804
SO-VID: ebd31c04-5ee4-437b-ba01-5b69305e4eba
Copyright © ©
1984