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      Magnetic properties of Fe 3O 4 antidot arrays synthesized by AFIR: atomic layer deposition, focused ion beam and thermal reduction

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          Abstract

          Magnetic films of magnetite (Fe 3O 4) with controlled defects, so-called antidot arrays, were synthesized by a new technique called AFIR. AFIR consists of the deposition of a thin film by atomic layer deposition, the generation of square and hexagonal arrays of holes using focused ion beam milling, and the subsequent thermal reduction of the antidot arrays. Magnetic characterizations were carried out by magneto-optic Kerr effect measurements, showing the enhancement of the coercivity for the antidot arrays. AFIR opens a new route to manufacture ordered antidot arrays of magnetic oxides with variable lattice parameters.

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          Most cited references38

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          Solid-State Dewetting of Thin Films

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            Magnetic domain formation in lithographically defined antidot Permalloy arrays

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              Nanoporous alumina as templates for multifunctional applications

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                Author and article information

                Contributors
                Role: Associate Editor
                Journal
                Beilstein J Nanotechnol
                Beilstein J Nanotechnol
                Beilstein Journal of Nanotechnology
                Beilstein-Institut (Trakehner Str. 7-9, 60487 Frankfurt am Main, Germany )
                2190-4286
                2018
                11 June 2018
                : 9
                : 1728-1734
                Affiliations
                [1 ]Departamento de Ciencias Básicas, Centro de Ingeniería y Desarrollo Sustentable, Facultad de Ingeniería, Universidad Central de Chile, Santa Isabel 1186, 8330601 Santiago, Chile
                [2 ]Center for the Development of Nanoscience and Nanotechnology (CEDENNA), 9170124 Santiago, Chile
                [3 ]Departamento de Física, Universidad de Santiago de Chile (USACH), Avda. Ecuador 3493, 9170124 Santiago, Chile
                [4 ]Instituto de Micro y Nanotecnología, IMN-CNM, CSIC (CEI UAM+CSIC), Isaac Newton 8, 28760 Tres Cantos, Madrid, Spain
                Author information
                http://orcid.org/0000-0003-2068-174X
                http://orcid.org/0000-0002-5908-8428
                Article
                10.3762/bjnano.9.164
                6009290
                ef3693ce-d7ff-44be-8956-d70d4fb7d635
                Copyright © 2018, Palma et al.; licensee Beilstein-Institut.

                This is an Open Access article under the terms of the Creative Commons Attribution License ( http://creativecommons.org/licenses/by/4.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

                The license is subject to the Beilstein Journal of Nanotechnology terms and conditions: (https://www.beilstein-journals.org/bjnano)

                History
                : 3 March 2018
                : 14 May 2018
                Categories
                Full Research Paper
                Nanoscience
                Nanotechnology

                antidot arrays,atomic layer deposition,focused ion beam,magnetic properties,thermal reduction

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