Title:
Microsystem Technologies
Abbreviated Title:
Microsystem Technologies
Publisher:
Springer Nature America, Inc
ISSN
(Print):
0946-7076
ISSN
(Electronic):
1432-1858
Publication date Created:
August
2004
Publication date
(Print):
August
2004
Volume: 10
Issue: 5
Pages: 432-437
Article
DOI: 10.1007/s00542-004-0418-z
SO-VID: f0f99a38-114e-4e44-ba3c-02a0d88b3dd3
Copyright © ©
2004