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      A capacitive pressure sensor interface using oversampling Δ-Σ demodulation techniques

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          A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivity

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            Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors

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              Oversampling A-to-D and D-to-A converters with multistage noise shaping modulators

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                Author and article information

                Journal
                IEEE Transactions on Instrumentation and Measurement
                IEEE Trans. Instrum. Meas.
                Institute of Electrical and Electronics Engineers (IEEE)
                00189456
                Feb. 1997
                : 46
                : 1
                : 3-7
                Article
                10.1109/19.552148
                f3d47c33-e120-4c03-abeb-2a59ec8e66fd
                © 1997
                History

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