Average rating: | Rated 5 of 5. |
Level of importance: | Rated 5 of 5. |
Level of validity: | Rated 5 of 5. |
Level of completeness: | Rated 4 of 5. |
Level of comprehensibility: | Rated 5 of 5. |
Competing interests: | None |
In general, this is a well written and interesting article which needs to be published. In this work, the authors presented a novel method for polishing SiC wafers effectively even in pure water using artemisinin (Qinghaosu) crystals. AFM was employed to conduct scratching tests to demonstrate the polishing mechanism of this proposed method. However, there are a few minor issues to be addressed.