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      Effects of ambients on oxygen precipitation in silicon

      Applied Physics Letters
      AIP Publishing

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          Most cited references9

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          Formation of stacking faults and enhanced diffusion in the oxidation of silicon

          S. M. Hu (1974)
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            Oxygen Content of Silicon Single Crystals

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              • Record: found
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              Characterization of structural defects in annealed silicon containing oxygen

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                Author and article information

                Journal
                Applied Physics Letters
                Appl. Phys. Lett.
                AIP Publishing
                0003-6951
                1077-3118
                April 1980
                April 1980
                : 36
                : 7
                : 561-564
                Article
                10.1063/1.91546
                0ae98417-8348-4e94-bf52-3f000a7a966a
                © 1980
                History

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