ScienceOpen:
research and publishing network
For Publishers
Discovery
Metadata
Peer review
Hosting
Publishing
For Researchers
Join
Publish
Review
Collect
My ScienceOpen
Sign in
Register
Dashboard
Blog
About
Search
Advanced search
My ScienceOpen
Sign in
Register
Dashboard
Search
Search
Advanced search
For Publishers
Discovery
Metadata
Peer review
Hosting
Publishing
For Researchers
Join
Publish
Review
Collect
Blog
About
6
views
0
references
Top references
cited by
134
Cite as...
0 reviews
Review
0
comments
Comment
0
recommends
+1
Recommend
0
collections
Add to
0
shares
Share
Twitter
Sina Weibo
Facebook
Email
1,768
similar
All similar
Record
: found
Abstract
: not found
Article
: not found
Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals
Author(s):
A. N. Cleland
,
M. L. Roukes
Publication date
Created:
October 28 1996
Publication date
(Print):
October 28 1996
Journal:
Applied Physics Letters
Publisher:
AIP Publishing
Read this article at
ScienceOpen
Publisher
Further versions
oa repository (via OAI-PMH doi match)
Powered by
Review
Review article
Invite someone to review
Bookmark
Cite as...
There is no author summary for this article yet. Authors can add summaries to their articles on ScienceOpen to make them more accessible to a non-specialist audience.
Related collections
Digitizing Fabrication
Author and article information
Journal
Title:
Applied Physics Letters
Abbreviated Title:
Appl. Phys. Lett.
Publisher:
AIP Publishing
ISSN (Print):
0003-6951
ISSN (Electronic):
1077-3118
Publication date Created:
October 28 1996
Publication date (Print):
October 28 1996
Volume
: 69
Issue
: 18
Pages
: 2653-2655
Article
DOI:
10.1063/1.117548
SO-VID:
14dbf39b-c9a0-4953-aa11-dfc1a5eed418
Copyright ©
© 1996
History
Data availability:
Comments
Comment on this article
Sign in to comment
scite_
Similar content
1,768
Photophysics of Nanometer Sized Metal Particles: Electron−Phonon Coupling and Coherent Excitation of Breathing Vibrational Modes
Authors:
Jose H Hodak
,
Gregory Hartland
,
Arnim Henglein
Self-Assembled Nanometer-Scale Magnetic Networks on Surfaces: Fundamental Interactions and Functional Properties
Authors:
C Carbone
,
C Carbone
,
S Gardonio
…
Less is more: improved thermal stability and plasmonic response in Au films via the use of sub-nanometer Ti adhesion layers
Authors:
William M. Abbott
,
Christopher Murray
,
Chuan De Zhong
…
See all similar
Cited by
121
Cantilever transducers as a platform for chemical and biological sensors
Authors:
Panos Datskos
,
Michael Sepaniak
,
Nickolay Lavrik
Quality factors in micron- and submicron-thick cantilevers
Authors:
K.Y. Yasumura
,
T.D. Stowe
,
E.M. Chow
…
An atomic-resolution nanomechanical mass sensor
Authors:
K. Jensen
,
Kwanpyo Kim
,
A Zettl
See all cited by