Micromachining applications of a high resolution ultrathick photoresist

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Journal

Journal ID (publisher-id): JVTBD9

Title: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Abbreviated Title: J. Vac. Sci. Technol. B

Publisher: American Vacuum Society

ISSN (Print): 0734211X

Publication date (Print): November 1995

Volume: 13

Issue: 6

Page: 3012

Article

DOI: 10.1116/1.588297

SO-VID: 1e44e812-3eb1-48d8-aa0e-1bc760083477

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