Monolithic Integration of Si3N4 Microring Filters With Bulk CMOS IC Through Post-Backend Process

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Title: IEEE Photonics Technology Letters

Abbreviated Title: IEEE Photon. Technol. Lett.

Publisher: Institute of Electrical and Electronics Engineers (IEEE)

ISSN (Print): 1041-1135

ISSN (Electronic): 1941-0174

Publication date Created: July 15 2015

Publication date (Print): July 15 2015

Volume: 27

Issue: 14

Pages: 1543-1546

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DOI: 10.1109/LPT.2015.2429677

SO-VID: 290a7027-1bcf-4c7f-8951-3fb9c2ccb78d

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Monolithic Integration of Si<sub>3</sub>N<sub>4</sub> Microring Filters With Bulk CMOS IC Through Post-Backend Process

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