Title:
Plasma Sources Science and Technology
Abbreviated Title:
Plasma Sources Sci. Technol.
Publisher:
IOP Publishing
ISSN
(Print):
0963-0252
ISSN
(Electronic):
1361-6595
Publication date Created:
August
01 1993
Publication date
(Print):
August
01 1993
Publication date
(Electronic):
January
01 1999
Volume: 2
Issue: 3
Pages: 173-179
Article
DOI: 10.1088/0963-0252/2/3/007
SO-VID: 2a68f341-04d0-492b-b7bb-c6b3aa1e9f92
Copyright © ©
1999