Determination of the layered structure in Mo/Si multilayers by grazing incidence X-ray reflectometry

Yakshin, A.E.; Maas, E.L.G; Görts, P.C.; Bijkerk, F.; Louis, E

doi:10.1016/S0921-4526(99)01909-2

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Determination of the layered structure in Mo/Si multilayers by grazing incidence X-ray reflectometry

Author(s): A.E Yakshin , E Louis , P.C Görts , E.L.G Maas , F Bijkerk

Publication date Created: June 2000

Publication date (Print): June 2000

Journal: Physica B: Condensed Matter

Publisher: Elsevier BV

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Title: Physica B: Condensed Matter

Abbreviated Title: Physica B: Condensed Matter

Publisher: Elsevier BV

ISSN (Print): 09214526

Publication date Created: June 2000

Publication date (Print): June 2000

Volume: 283

Issue: 1-3

Pages: 143-148

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DOI: 10.1016/S0921-4526(99)01909-2

SO-VID: 3d2eaf3e-9c48-40f5-9987-a48af8bea3fd

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http://www.elsevier.com/tdm/userlicense/1.0/

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Determination of the layered structure in Mo/Si multilayers by grazing incidence X-ray reflectometry

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