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      Investigation of the amorphous-to-crystalline transition in Mo/Si multilayers

      Author(s): , ,
      Publication date Created:
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      Journal: Journal of Applied Physics
      Publisher: AIP Publishing

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          High‐resolution electron microscopy study of x‐ray multilayer structures

          S Nutt, C-H Chang, D. G. Stearns … (1987)
          Article 0 comments Cited 44 times – based on 0 reviews     Review now
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            Extreme ultraviolet lithography

            C. W. Gwyn (1998)
            Article 0 comments Cited 40 times – based on 0 reviews     Review now
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              Interfacial reactions on annealing molybdenum‐silicon multilayers

              Robert Sinclair, Khiem Do, Karen Holloway (1989)
              Article 0 comments Cited 33 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Title: Journal of Applied Physics
                Abbreviated Title: Journal of Applied Physics
                Publisher: AIP Publishing
                ISSN (Print): 0021-8979
                ISSN (Electronic): 1089-7550
                Publication date Created: July 15 2001
                Publication date (Print): July 15 2001
                Volume: 90
                Issue: 2
                Pages: 1017-1025
                Article
                DOI: 10.1063/1.1381559
                SO-VID: cf3ea0b8-7021-424c-9f59-d01097d35e25
                Copyright © © 2001
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