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Fabrication of high aspect ratio Si nanogratings with smooth sidewalls for a deep UV-blocking particle filter
Author(s):
Pran Mukherjee
,
Myung-Gyu Kang
,
Thomas Zurbuchen
,
L. N. Guo
,
Fred A. Herrero
Publication date:
2007
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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Digitizing Fabrication
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DOI::
10.1116/1.2804612
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