ScienceOpen:
research and publishing network
For Publishers
Discovery
Metadata
Peer review
Hosting
Publishing
For Researchers
Join
Publish
Review
Collect
My ScienceOpen
Sign in
Register
Dashboard
Blog
About
Search
Advanced search
My ScienceOpen
Sign in
Register
Dashboard
Search
Search
Advanced search
For Publishers
Discovery
Metadata
Peer review
Hosting
Publishing
For Researchers
Join
Publish
Review
Collect
Blog
About
1
views
0
references
Top references
cited by
1
0 reviews
Review
0
comments
Comment
0
recommends
+1
Recommend
0
collections
Add to
0
shares
Share
Twitter
Sina Weibo
Facebook
Email
1,505
similar
All similar
Record
: found
Abstract
: not found
Article
: not found
Residual stress formation in multilayered TiN/TaNx coatings during reactive magnetron sputter deposition
Author(s):
M. NORDIN
,
M Larsson
,
T Joelsson
,
J. Birch
,
L. Hultman
Publication date:
2000
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Read this article at
ScienceOpen
Publisher
Bookmark
There is no author summary for this article yet. Authors can add summaries to their articles on ScienceOpen to make them more accessible to a non-specialist audience.
Related collections
Stress signalling in stem cells
Author and article information
Journal
DOI::
10.1116/1.1308594
Data availability:
Comments
Comment on this article
Sign in to comment
scite_
Similar content
1,505
TaNX coatings deposited by HPPMS on SS316L bipolar plates for polymer electrolyte membrane fuel cells: Correlation between corrosion current, contact resistance and barrier oxide film formation
Authors:
Lucia Mendizabal
,
Anders Oedegaard
,
Ole Edvard Kongstein
…
Under-layer behavior study of low resistance Ta/TaNx barrier film
Authors:
Yu-Sheng Wang
,
Chi-Cheng Hung
,
Wen-Hsi Lee
…
Effects of the TaNx interface layer on doped tantalum oxide high-k films
Authors:
J. LU
,
Yue Kuo
,
J.-Y. Tewg
…
See all similar
Cited by
1
Optical properties, structural parameters, and bonding of highly textured rocksalt tantalum nitride films
Authors:
G. M. Matenoglou
,
L. E. Koutsokeras
,
Ch. E. Lekka
…
See all cited by