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2,615
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Dry followed by wet backside etching processes for micromachined endfire antennae
Author(s):
M Saadaoui
,
P Pons
,
R. PLANA
,
L Bary
,
P. DUBREUIL
,
D Bourrier
,
D Vasilache
,
D. Neculoiu
,
A. MULLER
Publication date:
2005
Journal:
J. Micromech. Microeng.
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DOI::
10.1088/0960-1317/15/7/010
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