[1
]Chongqing Key Laboratory of Micro‐Nano Systems and Smart Transduction Collaborative
Innovation Center on Micro‐Nano Transduction and Intelligent Eco‐Internet of Things
Chongqing Key Laboratory of Colleges and Universities on Micro‐Nano Systems Technology
and Smart Transducing National Research Base of Intelligent Manufacturing Service
Chongqing Technology and Business University Nan'an District Chongqing 400067 China
[2
]Department of Microsystems (IMS) Faculty of Technology Natural Sciences and Maritime
Sciences University of South‐Eastern Norway Postboks 235 3603 Kongsberg Norway