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Effects of channel thickness on characteristics of HZO-TFTs fabricated at low temperature
Author(s):
J Wu
,
F.L. Zhao
,
J.C. Dong
,
L.F. LIU
,
Y WANG
,
S.D. Zhang
,
Y-Y Cong
,
D.D. Han
,
Z.F. Chen
,
X. ZHANG
,
N.N. Zhao
,
D Han
,
YY Cong
,
NN Zhao
,
ZF Chen
,
JC Dong
,
FL Zhao
,
SD Zhang
,
LF Liu
,
X. Zhang
,
Y. Wang
Publication date:
2015
Journal:
Electronics Letters
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Related collections
EU NanoSafety Cluster Publications: Journal Articles
Author and article information
Journal
DOI::
10.1049/el.2015.0362
ScienceOpen disciplines:
Nanomaterials
,
Materials science
Data availability:
ScienceOpen disciplines:
Nanomaterials
,
Materials science
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