Lipon thin films grown by plasma-enhanced metalorganic chemical vapor deposition in a N2–H2–Ar gas mixture

There is no author summary for this article yet. Authors can add summaries to their articles on ScienceOpen to make them more accessible to a non-specialist audience.

Related collections

Author and article information

Journal

Title: Thin Solid Films

Abbreviated Title: Thin Solid Films

Publisher: Elsevier BV

ISSN (Print): 00406090

Publication date Created: January 2012

Publication date (Print): January 2012

Volume: 520

Issue: 6

Pages: 1799-1803

Article

DOI: 10.1016/j.tsf.2011.08.091

SO-VID: 5ebe3765-5b3c-4aed-9426-da32df6ad6af

License:

http://www.elsevier.com/tdm/userlicense/1.0/

History

Data availability:

Comments

Comment on this article

scite_

Cited by 3

See all cited by