Nanosphere lithography: A materials general fabrication process for periodic particle array surfaces

Hulteen, John C.

doi:10.1116/1.579726

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Nanosphere lithography: A materials general fabrication process for periodic particle array surfaces

Author(s): John C. Hulteen

Publication date (Print): May 1995

Journal: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Publisher: American Vacuum Society

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Journal ID (publisher-id): JVTAD6

Title: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Abbreviated Title: J. Vac. Sci. Technol. A

Publisher: American Vacuum Society

ISSN (Print): 07342101

Publication date (Print): May 1995

Volume: 13

Issue: 3

Page: 1553

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DOI: 10.1116/1.579726

SO-VID: 61d66816-a8ce-47d9-b06b-62c0ccef57f0

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Nanosphere lithography: A materials general fabrication process for periodic particle array surfaces

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