[1
]Key Laboratory of Microelectronic Devices and Integrated Technology Institute of Microelectronics
Chinese Academy of Sciences Beijing 100029 China
[2
]State Key Laboratory of Functional Materials for Informatics Shanghai Institute of
Micro-System and Information Technology Chinese Academy of Sciences Shanghai 200050
China
[3
]University of Chinese Academy of Sciences Beijing 100029 China
[4
]Department of Precision Instrument Tsinghua University Beijing 100084 China
[5
]Frontier Institute of Chip and System Fudan University Shanghai 200433 China