Thickness of natural oxide films determined by AES and XPS with/without sputtering

Mathieu, H J; Datta, M.; Landolt, D

doi:10.1116/1.573260

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Thickness of natural oxide films determined by AES and XPS with/without sputtering

Author(s): H. J. Mathieu , M. Datta , D. Landolt

Publication date Created: March 1985

Publication date (Print): March 1985

Journal: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Publisher: American Vacuum Society

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Title: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Abbreviated Title: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Publisher: American Vacuum Society

ISSN (Print): 0734-2101

ISSN (Electronic): 1520-8559

Publication date Created: March 1985

Publication date (Print): March 1985

Volume: 3

Issue: 2

Pages: 331-335

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DOI: 10.1116/1.573260

SO-VID: 9173ebdb-c5c5-4f95-abc8-d34543118df0

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Thickness of natural oxide films determined by AES and XPS with/without sputtering

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