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      Thickness of natural oxide films determined by AES and XPS with/without sputtering

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      Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
      American Vacuum Society

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          Journal
          Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
          Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
          American Vacuum Society
          0734-2101
          1520-8559
          March 1985
          March 1985
          : 3
          : 2
          : 331-335
          Article
          10.1116/1.573260
          9173ebdb-c5c5-4f95-abc8-d34543118df0
          © 1985
          Product
          Self URI (article page): http://avs.scitation.org/doi/10.1116/1.573260

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