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      Impact of Backend Processing on Integrated Ferroelectric Capacitor Characteristics

      Author(s): , , , ,
      Publication date (Electronic):
      Journal: MRS Proceedings
      Publisher: Cambridge University Press (CUP)

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          Electrical characteristics of ferroelectric PZT thin films for DRAM applications

          W.H. Shepherd, R. Moazzami, C. Hu (1992)
          Article 0 comments Cited 42 times – based on 0 reviews     Review now
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            Ferroelectrics for non-volatile memories

            P.K Larsen, G.A.C.M. Spierings, R. Cuppens (1992)
            Article 0 comments Cited 2 times – based on 0 reviews     Review now
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              Author and article information

              Journal
              Journal ID (publisher-id): applab
              Title: MRS Proceedings
              Abbreviated Title: MRS Proc.
              Publisher: Cambridge University Press (CUP)
              ISSN (Electronic): 1946-4274
              Publication date Created: January 1993
              Publication date (Electronic): February 21 2011
              Publication date (Print): January 1993
              Volume: 310
              Article
              DOI: 10.1557/PROC-310-151
              SO-VID: 917554f0-c917-4cd3-816b-ca89fb578129
              Copyright © © 1993
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