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      Process-Induced Morphological Defects in Epitaxial CVD Silicon Carbide

      Author(s): ,
      Publication date Created:
      Publication date (Print):
      Journal: physica status solidi (b)
      Publisher: Wiley

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          Journal
          Title: physica status solidi (b)
          Abbreviated Title: phys. stat. sol. (b)
          Publisher: Wiley
          ISSN (Print): 0370-1972
          ISSN (Electronic): 1521-3951
          Publication date Created: July 1997
          Publication date (Print): July 1997
          Volume: 202
          Issue: 1
          Pages: 529-548
          Article
          DOI: 10.1002/1521-3951(199707)202:1<529::AID-PSSB529>3.0.CO;2-E
          SO-VID: 99eab552-2939-430f-af05-e74307f4b4e0
          Copyright © © 1997
          License:

          http://doi.wiley.com/10.1002/tdm_license_1.1

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