Dose dependence in the laser annealing of arsenic‐implanted silicon

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Laser annealing of boron‐implanted silicon

P. King, M Murakami, W. H. CHRISTIE … (1978)

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Journal

Title: Applied Physics Letters

Abbreviated Title: Appl. Phys. Lett.

Publisher: AIP Publishing

ISSN (Print): 0003-6951

ISSN (Electronic): 1077-3118

Publication date Created: September 1978

Publication date (Print): September 1978

Volume: 33

Issue: 5

Pages: 429-431

Article

DOI: 10.1063/1.90411

SO-VID: b3a5ee9e-17cc-402f-95ac-35217c449a6b

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