23
views
0
recommends
+1 Recommend
0 collections
    0
    shares
      • Record: found
      • Abstract: found
      • Article: found
      Is Open Access

      A phenomenological model for the description of rotating spokes in HiPIMS discharges

      Preprint

      Read this article at

      Bookmark
          There is no author summary for this article yet. Authors can add summaries to their articles on ScienceOpen to make them more accessible to a non-specialist audience.

          Abstract

          In the ionization region above circular planar magnetrons well defined regions of high emissivity are observed, when the discharge is driven in the HiPIMS regime. Once their mode is stabilized, these structures rotate in the E x B direction with a constant rotation frequency in the hundreds of kHz range. A phenomenological model of the phenomenon is developed, in the form of a system of nonlinear coupled partial differential equations. The system is solved analytically in a frame co-moving with the structure, and its solution gives the neutral density and the plasma density once the electron density shape is imposed. From the balance of the mechanisms of ionization, electron loss and constant neutral refilling, a steady state configuration in the rotating frame is achieved for the electron and neutral densities. Therefore, the spoke experimentally observed can be sustained simply by the combination of this highly reduced number of phenomena. Finally, a study of the sensitivity of neutral and plasma densities to the physical parameters is also given.

          Related collections

          Most cited references1

          • Record: found
          • Abstract: not found
          • Article: not found

          Sputtering Yield Measurements with Low‐Energy Metal Ion Beams

            Bookmark

            Author and article information

            Journal
            2013-05-23
            2013-08-19
            Article
            10.1088/0963-0252/22/5/055012
            1305.5354
            c340a67f-9478-4b2e-8386-772f743576d8

            http://arxiv.org/licenses/nonexclusive-distrib/1.0/

            History
            Custom metadata
            S Gallian et al 2013 Plasma Sources Sci. Technol. 22 055012
            physics.plasm-ph

            Plasma physics
            Plasma physics

            Comments

            Comment on this article