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      Phase control of cubic boron nitride thin films

      Author(s): ,
      Publication date Created:
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      Journal: Journal of Applied Physics
      Publisher: AIP Publishing

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          Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

          Peter Sigmund (1969)
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            An intrinsic stress scaling law for polycrystalline thin films prepared by ion beam sputtering

            H. Windischmann (1987)
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              Structure and properties of quasi-amorphous films prepared by ion beam techniques

              D Dietrich, K. Bewilogua, H.-J. Erler … (1980)
              Article 0 comments Cited 57 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Title: Journal of Applied Physics
                Abbreviated Title: Journal of Applied Physics
                Publisher: AIP Publishing
                ISSN (Print): 0021-8979
                ISSN (Electronic): 1089-7550
                Publication date Created: July 15 1992
                Publication date (Print): July 15 1992
                Volume: 72
                Issue: 2
                Pages: 504-513
                Article
                DOI: 10.1063/1.351881
                SO-VID: c80cbf08-c2a1-46e1-958a-a7728094d884
                Copyright © © 1992
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