Title:
Plasma Sources Science and Technology
Abbreviated Title:
Plasma Sources Sci. Technol.
Publisher:
IOP Publishing
ISSN
(Electronic):
1361-6595
Publication date Created:
October
01 2016
Publication date
(Electronic):
September
30 2016
Volume: 25
Issue: 5
Page: 053002
Article
DOI: 10.1088/0963-0252/25/5/053002
SO-VID: ce8b6ac2-39e2-4612-bd78-f5842f9cd994
Copyright © ©
2016