Title:
Semiconductor Science and Technology
Abbreviated Title:
Semicond. Sci. Technol.
Publisher:
IOP Publishing
ISSN
(Print):
0268-1242
ISSN
(Electronic):
1361-6641
Publication date Created:
May
01 1996
Publication date
(Print):
May
01 1996
Volume: 11
Issue: 5
Pages: 759-765
Article
DOI: 10.1088/0268-1242/11/5/018
SO-VID: dc0d1b23-b363-40c1-8511-488fd972f706
Copyright © ©
1996