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      Growth and phase stability of epitaxial metastable InSb1−xBixfilms on GaAs. I. Crystal growth

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      Journal of Applied Physics
      AIP Publishing

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          Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

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            Positive‐ion bombardment of substrates in rf diode glow discharge sputtering

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              Cone Formation on Metal Targets during Sputtering

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                Author and article information

                Journal
                Journal of Applied Physics
                Journal of Applied Physics
                AIP Publishing
                0021-8979
                1089-7550
                March 1980
                March 1980
                : 51
                : 3
                : 1549-1559
                Article
                10.1063/1.327807
                dddab6ab-308c-4cad-af78-92c800a9191f
                © 1980
                History

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