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      SiH4 and GeH4 chemical vapor deposition of GeSi/Ge heterostructures

      , , , , ,

      Applied Surface Science

      Elsevier BV

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          Journal
          Applied Surface Science
          Applied Surface Science
          Elsevier BV
          01694332
          May 1997
          May 1997
          : 115
          : 1
          : 28-30
          Article
          10.1016/S0169-4332(96)00849-5
          © 1997

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