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SiH4 and GeH4 chemical vapor deposition of GeSi/Ge heterostructures
Author(s):
Shulin Gu
,
Xunming Zhu
,
Ning Jiang
,
Yi Shi
,
Rong Zhang
,
Youdou Zheng
Publication date
Created:
May 1997
Publication date
(Print):
May 1997
Journal:
Applied Surface Science
Publisher:
Elsevier BV
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Author and article information
Journal
Title:
Applied Surface Science
Abbreviated Title:
Applied Surface Science
Publisher:
Elsevier BV
ISSN (Print):
01694332
Publication date Created:
May 1997
Publication date (Print):
May 1997
Volume
: 115
Issue
: 1
Pages
: 28-30
Article
DOI:
10.1016/S0169-4332(96)00849-5
SO-VID:
ea37074f-f795-410a-9bc7-19f8ee4234c4
Copyright ©
© 1997
License:
https://www.elsevier.com/tdm/userlicense/1.0/
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