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Modification of the Preston equation for the chemical–mechanical polishing of copper
Author(s):
Q. Luo
,
S. Ramarajan
,
S.V. Babu
Publication date
Created:
November 1998
Publication date
(Print):
November 1998
Journal:
Thin Solid Films
Publisher:
Elsevier BV
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There is no author summary for this article yet. Authors can add summaries to their articles on ScienceOpen to make them more accessible to a non-specialist audience.
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Photoluminescent Nanomaterials
Author and article information
Journal
Title:
Thin Solid Films
Abbreviated Title:
Thin Solid Films
Publisher:
Elsevier BV
ISSN (Print):
00406090
Publication date Created:
November 1998
Publication date (Print):
November 1998
Volume
: 335
Issue
: 1-2
Pages
: 160-167
Article
DOI:
10.1016/S0040-6090(98)00896-7
SO-VID:
f8e60bdd-135b-40c1-82f3-acc7ff34da7f
Copyright ©
© 1998
License:
https://www.elsevier.com/tdm/userlicense/1.0/
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