Highly Unidirectional Uniform Optical Grating Couplers, Fabricated in Standard 45nm SOI-CMOS Foundry Process

Abstract

This paper defines new structures of highly unidirectional uniform optical grating couplers which are all within constraints of the standard 45nm SOI-CMOS foundry process. Analysis in terms of unidirectivity and coupling efficiency is done. Maximum achieved unidirectivity (power radiation in one direction) is 98%. Unidirectional uniform gratings are fabricated in the standard 45nm SOI-CMOS foundry process. These gratings are measured and compared, using the new method of comparison, with typical bidirectional uniform gratings fabricated in the same process, in terms of coupling efficiency (in this case unidirectivity) with the standard singlemode fiber. For both types of gratings spectrum is given, measured with optical spectrum analyzer.