Metal ion deposition from ionized mangetron sputtering discharge

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Journal

Journal ID (publisher-id): JVTBD9

Title: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Abbreviated Title: J. Vac. Sci. Technol. B

Publisher: American Vacuum Society

ISSN (Print): 0734211X

Publication date (Print): January 1994

Volume: 12

Issue: 1

Page: 449

Article

DOI: 10.1116/1.587142

SO-VID: 100479d0-03dd-498c-9074-2d8f6e6b64b7

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