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      Supersaturated substitutional alloys formed by ion implantation and pulsed laser annealing of group‐III and group‐V dopants in silicon

      Author(s): , , ,
      Publication date Created:
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      Journal: Journal of Applied Physics
      Publisher: AIP Publishing

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          Range and stopping-power tables for heavy ions

          L.C. Northcliffe, R.F. Schilling (1970)
          Article 0 comments Cited 510 times – based on 0 reviews     Review now
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            Solid Solubilities of Impurity Elements in Germanium and Silicon*

            F. Trumbore (1960)
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              Time‐resolved reflectivity of ion‐implanted silicon during laser annealing

              D. H. Auston, J A Golovchenko, R E Slusher … (1978)
              Article 0 comments Cited 105 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Title: Journal of Applied Physics
                Abbreviated Title: Journal of Applied Physics
                Publisher: AIP Publishing
                ISSN (Print): 0021-8979
                ISSN (Electronic): 1089-7550
                Publication date Created: January 1980
                Publication date (Print): January 1980
                Volume: 51
                Issue: 1
                Pages: 738-749
                Article
                DOI: 10.1063/1.327334
                SO-VID: 11fcc18b-4bc9-4894-bef2-a6ade79b9db9
                Copyright © © 1980
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