For Publishers
DiscoveryMetadataPeer reviewHostingPublishing
For Researchers
JoinPublishReviewCollect
Register
Blog
About
Search
Advanced search
My ScienceOpen
Search
For Publishers
For Researchers
Blog
About
9
views
0
references
 Top references
cited by
85
    
0 reviews
 Review
0
comments
 Comment
0
recommends
+1 Recommend
0 collections
    0
    shares
      1,579
      similar
       All similar
      • Record: found
      • Abstract: not found
      • Article: not found

      Stiction in surface micromachining

      Author(s): , , , ,
      Publication date Created:
      Publication date (Print):
      Journal: Journal of Micromechanics and Microengineering
      Publisher: IOP Publishing

      Read this article at

      ScienceOpenPublisher
      Bookmark
          There is no author summary for this article yet. Authors can add summaries to their articles on ScienceOpen to make them more accessible to a non-specialist audience.

          Related collections

          Author and article information

          Journal
          Title: Journal of Micromechanics and Microengineering
          Abbreviated Title: J. Micromech. Microeng.
          Publisher: IOP Publishing
          ISSN (Print): 0960-1317
          ISSN (Electronic): 1361-6439
          Publication date Created: December 01 1996
          Publication date (Print): December 01 1996
          Volume: 6
          Issue: 4
          Pages: 385-397
          Article
          DOI: 10.1088/0960-1317/6/4/005
          SO-VID: 24941942-29ad-4965-b744-c101566694d4
          Copyright © © 1996
          History

          Data availability:

          Comments

          Comment on this article

          scite_

          Similar content1,579

          See all similar

          Cited by82

          See all cited by