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      Anisotropic etching of silicon

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          Copper Precipitation on Dislocations in Silicon

          W. Dash (1956)
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            Electropolishing Silicon in Hydrofluoric Acid Solutions

            Dennis Turner (1958)
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              A Water-Amine-Complexing Agent System for Etching Silicon

              R. M. Finne, D. Klein (1967)
              Article 0 comments Cited 66 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Title: IEEE Transactions on Electron Devices
                Abbreviated Title: IEEE Trans. Electron Devices
                Publisher: Institute of Electrical and Electronics Engineers (IEEE)
                ISSN (Print): 0018-9383
                Publication date Created: October 1978
                Publication date (Print): October 1978
                Volume: 25
                Issue: 10
                Pages: 1185-1193
                Article
                DOI: 10.1109/T-ED.1978.19250
                SO-VID: 292eea7c-9cfd-42e6-8478-354437f9b22e
                Copyright © © 1978
                History

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