Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings

Thornton, John A.

doi:10.1116/1.1312732

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Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings

Author(s): John A. Thornton

Publication date Created: July 1974

Publication date (Print): July 1974

Journal: Journal of Vacuum Science and Technology

Publisher: American Vacuum Society

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Title: Journal of Vacuum Science and Technology

Abbreviated Title: Journal of Vacuum Science and Technology

Publisher: American Vacuum Society

ISSN (Print): 0022-5355

Publication date Created: July 1974

Publication date (Print): July 1974

Volume: 11

Issue: 4

Pages: 666-670

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DOI: 10.1116/1.1312732

SO-VID: 360708df-5f0f-4485-aa4e-eee25f035629

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Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings

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