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      Microstructural evolution during film growth

      Author(s): , , ,
      Publication date Created:
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      Journal: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
      Publisher: American Vacuum Society

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          High Rate Thick Film Growth

          J. Thornton (1977)
          Article 0 comments Cited 270 times – based on 0 reviews     Review now
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            Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings

            John A. Thornton (1974)
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              The microstructure of sputter‐deposited coatings

              John A. Thornton (1986)
              Article 0 comments Cited 176 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Title: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
                Abbreviated Title: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
                Publisher: American Vacuum Society
                ISSN (Print): 0734-2101
                ISSN (Electronic): 1520-8559
                Publication date Created: September 2003
                Publication date (Print): September 2003
                Volume: 21
                Issue: 5
                Pages: S117-S128
                Article
                DOI: 10.1116/1.1601610
                SO-VID: 6a267b8b-15e1-4049-afa3-c44fd3de5f2e
                Copyright © © 2003
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