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      Monocrystalline silicon carbide nanoelectromechanical systems

      Author(s): , , , , , ,
      Publication date Created:
      Publication date (Print):
      Journal: Applied Physics Letters
      Publisher: AIP Publishing

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          Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals

          A. Cleland, M Roukes (1996)
          Article 0 comments Cited 134 times – based on 0 reviews     Review now
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            Electronic Effects in the Elastic Constants ofn-Type Silicon

            John J Hall (1967)
            Article 0 comments Cited 107 times – based on 0 reviews     Review now
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              Calculated elastic constants and deformation potentials of cubic SiC

              B. Segall, M. van Schilfgaarde, M. Methfessel … (1991)
              Article 0 comments Cited 71 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Title: Applied Physics Letters
                Abbreviated Title: Appl. Phys. Lett.
                Publisher: AIP Publishing
                ISSN (Print): 0003-6951
                ISSN (Electronic): 1077-3118
                Publication date Created: January 08 2001
                Publication date (Print): January 08 2001
                Volume: 78
                Issue: 2
                Pages: 162-164
                Article
                DOI: 10.1063/1.1338959
                SO-VID: 4d4bd0f6-8f51-491c-855e-4b61d2d9cc08
                Copyright © © 2001
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