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Low Temperature Plasma-Enhanced ALD TiN Ultrathin Films for Hf0.5Zr0.5O2 -Based Ferroelectric MIM Structures
M. Kozodaev, Y. Lebedinskii, A. Chernikova, Sergei Polyakov, A. Markeev, Alexander N. Polyakov, Sergey Polyakov, Mikhail Polyakov
2017
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