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      Polymerization optimization of SU-8 photoresist and its applications in microfluidic systems and MEMS

      Author(s): , , , ,
      Publication date Created:
      Publication date (Print):
      Journal: Journal of Micromechanics and Microengineering
      Publisher: IOP Publishing

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          Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer

          D.J. Beebe, B.-H. Jo, L.M. Van Lerberghe … (2000)
          Article 0 comments Cited 179 times – based on 0 reviews     Review now
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            High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS

            P. Renaud, P Vettiger, J Brugger … (1998)
            Article 0 comments Cited 80 times – based on 0 reviews     Review now
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              Micromachining applications of a high resolution ultrathick photoresist

              K. Lee (1995)
              Article 0 comments Cited 61 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Title: Journal of Micromechanics and Microengineering
                Abbreviated Title: J. Micromech. Microeng.
                Publisher: IOP Publishing
                ISSN (Print): 0960-1317
                ISSN (Electronic): 1361-6439
                Publication date Created: January 01 2001
                Publication date (Print): January 01 2001
                Volume: 11
                Issue: 1
                Pages: 20-26
                Article
                DOI: 10.1088/0960-1317/11/1/304
                SO-VID: 99511f64-0d3a-4ab1-95d1-648a796fa108
                Copyright © © 2001
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