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      Fabrication Process for Josephson Integrated Circuits

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          Journal
          IBM Journal of Research and Development
          IBM J. Res. & Dev.
          IBM
          0018-8646
          0018-8646
          March 1980
          March 1980
          : 24
          : 2
          : 195-205
          Article
          10.1147/rd.242.0195
          a7212d19-0561-4679-b262-16892c109322
          © 1980
          History

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