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      Soft Lithography

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      Angewandte Chemie International Edition
      Wiley-Blackwell

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          Abstract

          <p class="first" id="d107340e61">Elastomeric stamps and molds provide a great opportunity to eliminate some of the disadvantages of photolithograpy, which is currently the leading technology for fabricating small structures. In the case of "soft lithography" there is no need for complex laboratory facilities and high-energy radiation. Therefore, this process is simple, inexpensive, and accessible even to molecular chemists. The current state of development in this promising area of research is presented here. </p>

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          Author and article information

          Journal
          Angewandte Chemie International Edition
          Angewandte Chemie International Edition
          Wiley-Blackwell
          1433-7851
          1521-3773
          March 16 1998
          March 16 1998
          : 37
          : 5
          : 550-575
          Article
          10.1002/(SICI)1521-3773(19980316)37:5<550::AID-ANIE550>3.0.CO;2-G
          29711088
          c6ac7b37-d449-490d-a8f9-87a5c6343523
          © 1998
          History

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